Fujifilm Dimatix Material Printer (DMP-2800) is used for fabrication, and KLA-Tencor (P-7) profiler is used for 2D and 3D analysis of each layer. Layer characterization is done with respect to critical thickness and resistance using 2D/3D material analysis. Layer-by-layer fabrication process and material evaluation are illustrated. Two different types of conductive ink PEDOT : PSS from Sigma Aldrich and silver nanoparticle ink from NovaCentrix are used for the fabrication of different printed layers. 5-mil Kapton® polyimide film is used as a flexible substrate material. The physical structure of the printed MEMS switch consists of an anchor with a clamp-clamp beam, a sacrificial layer, and bottom transmission lines. This paper presents a fully inkjet-printed flexible MEMS switch for phased-array antennas.
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